Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputtering. - Ataie, Sayed Alireza; Qashqay, S. Mahmoudi; Zamani-Meymian, Mohammad Reza; Ferreira, Fabio (Coatings (2079-6412), 2023)