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Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputtering.

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Title: Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputtering.
Authors: Ataie, Sayed Alireza1, ata.sayedalireza@gmail.com, Qashqay, S. Mahmoudi2, asamanehmahmoudi@gmail.com, Zamani-Meymian, Mohammad Reza2, r_zamani@iust.ac.ir, Ferreira, Fabio3,4, fabio.ferreira@dem.uc.pt
Source: Coatings (2079-6412); Jul2023, Vol. 13 Issue 7, p1141, 15p
Database: Applied Science & Technology Source
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ISSN:20796412
DOI:10.3390/coatings13071141