Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputtering.
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| Title: | Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputtering. |
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| Authors: | Ataie, Sayed Alireza1, ata.sayedalireza@gmail.com, Qashqay, S. Mahmoudi2, asamanehmahmoudi@gmail.com, Zamani-Meymian, Mohammad Reza2, r_zamani@iust.ac.ir, Ferreira, Fabio3,4, fabio.ferreira@dem.uc.pt |
| Source: | Coatings (2079-6412); Jul2023, Vol. 13 Issue 7, p1141, 15p |
| Database: | Applied Science & Technology Source |
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