Effect of induced defects on conduction mechanisms of noble-gas-implanted ScN thin films.

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Title: Effect of induced defects on conduction mechanisms of noble-gas-implanted ScN thin films.
Authors: Burcea, Razvan1, Bouteiller, Hugo1, Hurand, Simon1, Eklund, Per2, Barbot, Jean-François1, jean.francois.barbot@univ-poitiers.fr, le Febvrier, Arnaud2, arnaud.le.febvrier@liu.se
Source: Journal of Applied Physics; 8/7/2023, Vol. 134 Issue 5, p1-8, 8p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 169806050
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Effect of induced defects on conduction mechanisms of noble-gas-implanted ScN thin films.
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  Data: <searchLink fieldCode="AU" term="%22Burcea%2C+Razvan%22">Burcea, Razvan</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Bouteiller%2C+Hugo%22">Bouteiller, Hugo</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Hurand%2C+Simon%22">Hurand, Simon</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Eklund%2C+Per%22">Eklund, Per</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Barbot%2C+Jean-François%22">Barbot, Jean-François</searchLink><relatesTo>1</relatesTo>, <i>jean.francois.barbot@univ-poitiers.fr</i><br /><searchLink fieldCode="AU" term="%22le+Febvrier%2C+Arnaud%22">le Febvrier, Arnaud</searchLink><relatesTo>2</relatesTo>, <i>arnaud.le.febvrier@liu.se</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; 8/7/2023, Vol. 134 Issue 5, p1-8, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=169806050
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1063/5.0137428
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 8
        StartPage: 1
    Titles:
      – TitleFull: Effect of induced defects on conduction mechanisms of noble-gas-implanted ScN thin films.
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          Name:
            NameFull: Burcea, Razvan
      – PersonEntity:
          Name:
            NameFull: Bouteiller, Hugo
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            NameFull: Hurand, Simon
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            NameFull: Eklund, Per
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            NameFull: Barbot, Jean-François
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            NameFull: le Febvrier, Arnaud
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          Dates:
            – D: 07
              M: 08
              Text: 8/7/2023
              Type: published
              Y: 2023
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              Value: 00218979
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              Value: 134
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              Value: 5
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            – TitleFull: Journal of Applied Physics
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