Electrical and dielectric properties of RF sputtered nano Al2O3 film annealed at 400 °C. - Yalçın, Yeşim; Arslan, Öznur; İldeş, Caner; Çokduygulular, Erman; Çetinkaya, Çağlar; Kınacı, Barış (Journal of Materials Science: Materials in Electronics, 2023)