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Effects of Synchronous Bias Mode and Duty Cycle on Microstructure and Mechanical Properties of AlTiN Coatings Deposited via HiPIMS.

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Title: Effects of Synchronous Bias Mode and Duty Cycle on Microstructure and Mechanical Properties of AlTiN Coatings Deposited via HiPIMS.
Authors: Tang, Jian-Fu1, jftang@mail.lhu.edu.tw, Huang, Shi-Yu2, jams50911@gmail.com, Chen, I-Hong2, m10188024@mail2.mcut.edu.tw, Shen, Guan-Lun2, m10188011@mail2.mcut.edu.tw, Chang, Chi-Lung2,3, clchang@mail.mcut.edu.tw
Source: Coatings (2079-6412); Sep2023, Vol. 13 Issue 9, p1512, 13p
Database: Applied Science & Technology Source
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ISSN:20796412
DOI:10.3390/coatings13091512