STATISTICAL METHODS FOR SEMICONDUCTOR MANUFACTURING.
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| Title: | STATISTICAL METHODS FOR SEMICONDUCTOR MANUFACTURING. |
|---|---|
| Authors: | Boning, Duane S.1, Stefani, Jerry, Butler, Stephanie W. |
| Source: | Encyclopedia of Electrical & Electronics Engineering; 1999 1st Edition, Vol. 20, p463-479, 17p |
| Database: | Applied Science & Technology Source |
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