Li, Y. G., Liu, W. Y., & Cui, L. (2024). Influence of magnetic field strength on plasma, microstructure, and mechanical properties of Cr thin films deposited by MPPMS and DOMS. Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 42(2), 1. https://doi.org/10.1116/6.0003287
Chicago Style (17th ed.) CitationLi, Y. G., W. Y. Liu, and L. Cui. "Influence of Magnetic Field Strength on Plasma, Microstructure, and Mechanical Properties of Cr Thin Films Deposited by MPPMS and DOMS." Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films 42, no. 2 (2024): 1. https://doi.org/10.1116/6.0003287.
MLA (9th ed.) CitationLi, Y. G., et al. "Influence of Magnetic Field Strength on Plasma, Microstructure, and Mechanical Properties of Cr Thin Films Deposited by MPPMS and DOMS." Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, vol. 42, no. 2, 2024, p. 1, https://doi.org/10.1116/6.0003287.