Influence of magnetic field strength on plasma, microstructure, and mechanical properties of Cr thin films deposited by MPPMS and DOMS.
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| Title: | Influence of magnetic field strength on plasma, microstructure, and mechanical properties of Cr thin films deposited by MPPMS and DOMS. |
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| Authors: | Li, Y. G.1, ygli@dlut.edu.cn, Liu, W. Y.1, Cui, L.1 |
| Source: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Mar2024, Vol. 42 Issue 2, p1-11, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07342101 |
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| DOI: | 10.1116/6.0003287 |
