Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering.
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| Title: | Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering. |
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| Authors: | Hu, Shao-Hwa1, Lin, Yen-Sheng2, yslin@isu.edu.tw, Su, Shui-Hsiang2, He, Jing-Shi1, Ai, Ya-Zhao1 |
| Source: | Journal of Electronic Materials; May2024, Vol. 53 Issue 5, p2410-2420, 11p |
| Database: | Applied Science & Technology Source |
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