Study of AlN Epitaxial Growth on Si (111) Substrate Using Pulsed Metal–Organic Chemical Vapour Deposition.
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| Title: | Study of AlN Epitaxial Growth on Si (111) Substrate Using Pulsed Metal–Organic Chemical Vapour Deposition. |
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| Authors: | Hisyam, Muhammad Iznul1, 17145940@siswa.um.edu.my, Shuhaimi, Ahmad1, shuhaimi@um.edu.mysma190013@siswa.um.edu.my, Norhaniza, Rizuan1, Mansor, Marwan1, Williams, Adam2, adam_joseph@silterra.com, Mat Hussin, Mohd Rofei3, rofei@mimos.my |
| Source: | Crystals (2073-4352); Apr2024, Vol. 14 Issue 4, p371, 11p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20734352 |
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| DOI: | 10.3390/cryst14040371 |
