Comparison of Fourier optics-based methods for modeling coherence scanning interferometry.
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| Title: | Comparison of Fourier optics-based methods for modeling coherence scanning interferometry. |
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| Authors: | Hooshmand, Helia1, helia.hooshmand@nottingham.ac.uk, Pahl, Tobias2, tobias.pahl@uni-kassel.de, de Groot, Peter J.3, peter.degroot@ametek.com, Lehmann, Peter2, p.lehmann@uni-kassel.de, Pappas, Athanasios1, athanasios.pappas@nottingham.ac.uk, Su, Rong4, surong@siom.ac.cn, Leach, Richard1, richard.leach@nottingham.ac.uk, Piano, Samanta1, samata.piano@nottingham.ac.uk |
| Source: | Optical Engineering; Apr2024, Vol. 63 Issue 4, p44102-44102, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00913286 |
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| DOI: | 10.1117/1.OE.63.4.044102 |
