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Medium Pressure Plasma Processing of Fused Silica: A Comparative Study for Material Removal Rate.

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Title: Medium Pressure Plasma Processing of Fused Silica: A Comparative Study for Material Removal Rate.
Authors: Krishna, Enni1, Sreelakshmy, K.1, Dev, D. Sam Dayala1, Das, Manas2, manasdas@iitg.ac.in
Source: Plasma Chemistry & Plasma Processing; Mar2024, Vol. 44 Issue 2, p1069-1082, 14p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 177623135
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PubType: Academic Journal
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  Data: Medium Pressure Plasma Processing of Fused Silica: A Comparative Study for Material Removal Rate.
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      – Type: doi
        Value: 10.1007/s11090-023-10440-w
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      – Code: eng
        Text: English
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      – TitleFull: Medium Pressure Plasma Processing of Fused Silica: A Comparative Study for Material Removal Rate.
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            NameFull: Krishna, Enni
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            NameFull: Sreelakshmy, K.
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            NameFull: Dev, D. Sam Dayala
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              Text: Mar2024
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              Y: 2024
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