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Improved piezoelectric properties of zno films obtained by magnetron sputtering power stacking process.

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Bibliographic Details
Title: Improved piezoelectric properties of zno films obtained by magnetron sputtering power stacking process.
Authors: Li, Youjiang1, Zhang, Yan2, Cui, Qingxiong1, Ren, Yong1, Dai, Bo1, daibo@swust.edu.cn, Jin, Xingyun1, Shi, Yeming1
Source: Journal of Materials Science: Materials in Electronics; Oct2024, Vol. 35 Issue 28, p1-10, 10p
Database: Applied Science & Technology Source
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ISSN:09574522
DOI:10.1007/s10854-024-13598-x