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Improved piezoelectric properties of zno films obtained by magnetron sputtering power stacking process.

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Title: Improved piezoelectric properties of zno films obtained by magnetron sputtering power stacking process.
Authors: Li, Youjiang1, Zhang, Yan2, Cui, Qingxiong1, Ren, Yong1, Dai, Bo1, daibo@swust.edu.cn, Jin, Xingyun1, Shi, Yeming1
Source: Journal of Materials Science: Materials in Electronics; Oct2024, Vol. 35 Issue 28, p1-10, 10p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 180141379
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Improved piezoelectric properties of zno films obtained by magnetron sputtering power stacking process.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%3A+Materials+in+Electronics%22">Journal of Materials Science: Materials in Electronics</searchLink>; Oct2024, Vol. 35 Issue 28, p1-10, 10p
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RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s10854-024-13598-x
    Languages:
      – Code: eng
        Text: English
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        PageCount: 10
        StartPage: 1
    Titles:
      – TitleFull: Improved piezoelectric properties of zno films obtained by magnetron sputtering power stacking process.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Li, Youjiang
      – PersonEntity:
          Name:
            NameFull: Zhang, Yan
      – PersonEntity:
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            NameFull: Cui, Qingxiong
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            NameFull: Ren, Yong
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            NameFull: Dai, Bo
      – PersonEntity:
          Name:
            NameFull: Jin, Xingyun
      – PersonEntity:
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            NameFull: Shi, Yeming
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          Dates:
            – D: 01
              M: 10
              Text: Oct2024
              Type: published
              Y: 2024
          Identifiers:
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              Value: 09574522
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              Value: 35
            – Type: issue
              Value: 28
          Titles:
            – TitleFull: Journal of Materials Science: Materials in Electronics
              Type: main
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