Improved piezoelectric properties of zno films obtained by magnetron sputtering power stacking process.
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| Title: | Improved piezoelectric properties of zno films obtained by magnetron sputtering power stacking process. |
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| Authors: | Li, Youjiang1, Zhang, Yan2, Cui, Qingxiong1, Ren, Yong1, Dai, Bo1, daibo@swust.edu.cn, Jin, Xingyun1, Shi, Yeming1 |
| Source: | Journal of Materials Science: Materials in Electronics; Oct2024, Vol. 35 Issue 28, p1-10, 10p |
| Database: | Applied Science & Technology Source |
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