View in EDS

Design of an atomic layer deposition system with in situ reflection high energy electron diffraction.

Saved in:
Bibliographic Details
Title: Design of an atomic layer deposition system with in situ reflection high energy electron diffraction.
Authors: Howzen, Alexandra J.1, Caspar, Justin2, Oztekin, Alparslan2, Strandwitz, Nicholas C.1, nis212@lehigh.edu
Source: Review of Scientific Instruments; Nov2024, Vol. 95 Issue 11, p1-11, 11p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 181207882
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Design of an atomic layer deposition system with in situ reflection high energy electron diffraction.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Howzen%2C+Alexandra+J%2E%22">Howzen, Alexandra J.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Caspar%2C+Justin%22">Caspar, Justin</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Oztekin%2C+Alparslan%22">Oztekin, Alparslan</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Strandwitz%2C+Nicholas+C%2E%22">Strandwitz, Nicholas C.</searchLink><relatesTo>1</relatesTo>, <i>nis212@lehigh.edu</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Review+of+Scientific+Instruments%22">Review of Scientific Instruments</searchLink>; Nov2024, Vol. 95 Issue 11, p1-11, 11p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=181207882
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/5.0206286
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 11
        StartPage: 1
    Titles:
      – TitleFull: Design of an atomic layer deposition system with in situ reflection high energy electron diffraction.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Howzen, Alexandra J.
      – PersonEntity:
          Name:
            NameFull: Caspar, Justin
      – PersonEntity:
          Name:
            NameFull: Oztekin, Alparslan
      – PersonEntity:
          Name:
            NameFull: Strandwitz, Nicholas C.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 11
              Text: Nov2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 00346748
          Numbering:
            – Type: volume
              Value: 95
            – Type: issue
              Value: 11
          Titles:
            – TitleFull: Review of Scientific Instruments
              Type: main
ResultId 1