View in EDS HTML Full Text PDF Full Text

Role of ultra-thin tungsten interlayer in blocking nitrogen diffusion and reducing specific contact resistivity in titanium/n+-Si ohmic contacts.

Saved in:
Bibliographic Details
Title: Role of ultra-thin tungsten interlayer in blocking nitrogen diffusion and reducing specific contact resistivity in titanium/n+-Si ohmic contacts.
Authors: Chen, Xu1,2,3, Xu, Jing1,2,3, xujing@ime.ac.cn, Mao, Shujuan4, Liu, Chang1,2,3, Liu, Jinbiao1,2, Sun, XiangLie4, He, Yanping1,2,3, Wang, Guilei4, Zhao, Chao4, Luo, Jun1,2,3, luojun@ime.ac.cn
Source: Journal of Materials Science: Materials in Electronics; Dec2024, Vol. 35 Issue 34, p1-9, 9p
Database: Applied Science & Technology Source
Full text is not displayed to guests.
FullText Links:
  – Type: pdflink
Text:
  Availability: 1
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 181536094
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Role of ultra-thin tungsten interlayer in blocking nitrogen diffusion and reducing specific contact resistivity in titanium/n+-Si ohmic contacts.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Chen%2C+Xu%22">Chen, Xu</searchLink><relatesTo>1,2,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Xu%2C+Jing%22">Xu, Jing</searchLink><relatesTo>1,2,3</relatesTo>, <i>xujing@ime.ac.cn</i><br /><searchLink fieldCode="AU" term="%22Mao%2C+Shujuan%22">Mao, Shujuan</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AU" term="%22Liu%2C+Chang%22">Liu, Chang</searchLink><relatesTo>1,2,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Liu%2C+Jinbiao%22">Liu, Jinbiao</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Sun%2C+XiangLie%22">Sun, XiangLie</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AU" term="%22He%2C+Yanping%22">He, Yanping</searchLink><relatesTo>1,2,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Wang%2C+Guilei%22">Wang, Guilei</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhao%2C+Chao%22">Zhao, Chao</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AU" term="%22Luo%2C+Jun%22">Luo, Jun</searchLink><relatesTo>1,2,3</relatesTo>, <i>luojun@ime.ac.cn</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%3A+Materials+in+Electronics%22">Journal of Materials Science: Materials in Electronics</searchLink>; Dec2024, Vol. 35 Issue 34, p1-9, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=181536094
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s10854-024-13942-1
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 9
        StartPage: 1
    Titles:
      – TitleFull: Role of ultra-thin tungsten interlayer in blocking nitrogen diffusion and reducing specific contact resistivity in titanium/n+-Si ohmic contacts.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Chen, Xu
      – PersonEntity:
          Name:
            NameFull: Xu, Jing
      – PersonEntity:
          Name:
            NameFull: Mao, Shujuan
      – PersonEntity:
          Name:
            NameFull: Liu, Chang
      – PersonEntity:
          Name:
            NameFull: Liu, Jinbiao
      – PersonEntity:
          Name:
            NameFull: Sun, XiangLie
      – PersonEntity:
          Name:
            NameFull: He, Yanping
      – PersonEntity:
          Name:
            NameFull: Wang, Guilei
      – PersonEntity:
          Name:
            NameFull: Zhao, Chao
      – PersonEntity:
          Name:
            NameFull: Luo, Jun
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 12
              Text: Dec2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 09574522
          Numbering:
            – Type: volume
              Value: 35
            – Type: issue
              Value: 34
          Titles:
            – TitleFull: Journal of Materials Science: Materials in Electronics
              Type: main
ResultId 1