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Investigation of the Measurement Systems' Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures.

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Title: Investigation of the Measurement Systems' Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures.
Authors: Burkert, Selina1, lukas.schwoerer@hs-aalen.deselina.burkert@hs-aalen.de, Schwörer, Lukas1, andreas.heinrich@hs-aalen.de, Schubert, Tim2, tim.schubert@hs-aalen.de, Grundmann, Jana3, jana.grundmann@ptb.de, Stein, David4, david.stein@uni-a.de, Heinrich, Andreas1
Source: Metrology; Dec2024, Vol. 4 Issue 4, p673-694, 22p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 181940095
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Investigation of the Measurement Systems' Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures.
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  Data: <searchLink fieldCode="JN" term="%22Metrology%22">Metrology</searchLink>; Dec2024, Vol. 4 Issue 4, p673-694, 22p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=181940095
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.3390/metrology4040040
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 22
        StartPage: 673
    Titles:
      – TitleFull: Investigation of the Measurement Systems' Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures.
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      – PersonEntity:
          Name:
            NameFull: Burkert, Selina
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            NameFull: Schwörer, Lukas
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            NameFull: Schubert, Tim
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            NameFull: Grundmann, Jana
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            NameFull: Stein, David
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            NameFull: Heinrich, Andreas
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          Dates:
            – D: 01
              M: 12
              Text: Dec2024
              Type: published
              Y: 2024
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              Value: 4
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              Value: 4
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            – TitleFull: Metrology
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