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Growth and characterization of SiGe/Si superlattice for vertically stacked DRAM.

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Title: Growth and characterization of SiGe/Si superlattice for vertically stacked DRAM.
Authors: Wang, Hailing1, Wang, Xiangsheng1, Song, Yanpeng1, Liu, Xiaomeng1, Zhang, Ying1, Liu, Xinyou1, Wang, Guilei1, guilei.wang@bjsamt.org.cn, Zhao, Chao1, chao.zhao@bjsamt.org.cn
Source: Journal of Materials Science: Materials in Electronics; Jan2025, Vol. 36 Issue 2, p1-11, 11p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 182208199
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Growth and characterization of SiGe/Si superlattice for vertically stacked DRAM.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Wang%2C+Hailing%22">Wang, Hailing</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Wang%2C+Xiangsheng%22">Wang, Xiangsheng</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Song%2C+Yanpeng%22">Song, Yanpeng</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Liu%2C+Xiaomeng%22">Liu, Xiaomeng</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Ying%22">Zhang, Ying</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Liu%2C+Xinyou%22">Liu, Xinyou</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Wang%2C+Guilei%22">Wang, Guilei</searchLink><relatesTo>1</relatesTo>, <i>guilei.wang@bjsamt.org.cn</i><br /><searchLink fieldCode="AU" term="%22Zhao%2C+Chao%22">Zhao, Chao</searchLink><relatesTo>1</relatesTo>, <i>chao.zhao@bjsamt.org.cn</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%3A+Materials+in+Electronics%22">Journal of Materials Science: Materials in Electronics</searchLink>; Jan2025, Vol. 36 Issue 2, p1-11, 11p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=182208199
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1007/s10854-024-14167-y
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 11
        StartPage: 1
    Titles:
      – TitleFull: Growth and characterization of SiGe/Si superlattice for vertically stacked DRAM.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Wang, Hailing
      – PersonEntity:
          Name:
            NameFull: Wang, Xiangsheng
      – PersonEntity:
          Name:
            NameFull: Song, Yanpeng
      – PersonEntity:
          Name:
            NameFull: Liu, Xiaomeng
      – PersonEntity:
          Name:
            NameFull: Zhang, Ying
      – PersonEntity:
          Name:
            NameFull: Liu, Xinyou
      – PersonEntity:
          Name:
            NameFull: Wang, Guilei
      – PersonEntity:
          Name:
            NameFull: Zhao, Chao
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 11
              M: 01
              Text: Jan2025
              Type: published
              Y: 2025
          Identifiers:
            – Type: issn-print
              Value: 09574522
          Numbering:
            – Type: volume
              Value: 36
            – Type: issue
              Value: 2
          Titles:
            – TitleFull: Journal of Materials Science: Materials in Electronics
              Type: main
ResultId 1