Effect of Nitrogen Ratio in Sputtering on the Quality of Film Formation and Electron Emission Properties of Nitride Films.
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| Title: | Effect of Nitrogen Ratio in Sputtering on the Quality of Film Formation and Electron Emission Properties of Nitride Films. |
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| Authors: | Gu, Yuqing1, jameslee@uestc.edu.cn, Li, Juannan1, Wang, Dan2, alexaustin@xjtu.edu.cn, Zhang, Na3 |
| Source: | Coatings (2079-6412); Jan2025, Vol. 15 Issue 1, p55, 12p |
| Database: | Applied Science & Technology Source |
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