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Preparation of Silicon Monoxide by Electric Thermal Coupling Vapor Deposition Process.

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Title: Preparation of Silicon Monoxide by Electric Thermal Coupling Vapor Deposition Process.
Authors: He, Minqi1, 1073059225@qq.com
Source: Metallurgical & Materials Transactions. Part B; Feb2025, Vol. 56 Issue 1, p482-498, 17p
Database: Applied Science & Technology Source
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        Value: 10.1007/s11663-024-03346-1
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        Text: English
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      – TitleFull: Preparation of Silicon Monoxide by Electric Thermal Coupling Vapor Deposition Process.
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              Text: Feb2025
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