Preparation of Silicon Monoxide by Electric Thermal Coupling Vapor Deposition Process.
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| Title: | Preparation of Silicon Monoxide by Electric Thermal Coupling Vapor Deposition Process. |
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| Authors: | He, Minqi1, 1073059225@qq.com |
| Source: | Metallurgical & Materials Transactions. Part B; Feb2025, Vol. 56 Issue 1, p482-498, 17p |
| Database: | Applied Science & Technology Source |
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