Carrier Activation at End-of-Range (EOR) Defects and Grain Boundaries in Boron-Doped Silicon.
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| Title: | Carrier Activation at End-of-Range (EOR) Defects and Grain Boundaries in Boron-Doped Silicon. |
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| Authors: | Li, Yi-Yao1, Yang, Yu-Chen2, Chou, Tung-Huan2, Huang, Yu-Lin2, Chang, Chia-He2, Hsu, Ya-Lan2, Lin, Kun-Lin2, kllin@narlabs.org.tw |
| Source: | Journal of Electronic Materials; Mar2025, Vol. 54 Issue 3, p2211-2218, 8p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 03615235 |
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| DOI: | 10.1007/s11664-024-11725-2 |