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Virtual metrology for chemical mechanical planarization of semiconductor wafers.

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Bibliographic Details
Title:	Virtual metrology for chemical mechanical planarization of semiconductor wafers.
Authors:	Deivendran, Balamurugan¹, Masampally, Vishnu Swaroopji¹, Nadimpalli, Naga Ravikumar Varma¹, Runkana, Venkataramana¹, venkat.runkana@tcs.com
Source:	Journal of Intelligent Manufacturing; Mar2025, Vol. 36 Issue 3, p1923-1942, 20p
Database:	Applied Science & Technology Source
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Description
ISSN:	09565515
DOI:	10.1007/s10845-024-02335-0