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Virtual metrology for chemical mechanical planarization of semiconductor wafers.

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Title: Virtual metrology for chemical mechanical planarization of semiconductor wafers.
Authors: Deivendran, Balamurugan1, Masampally, Vishnu Swaroopji1, Nadimpalli, Naga Ravikumar Varma1, Runkana, Venkataramana1, venkat.runkana@tcs.com
Source: Journal of Intelligent Manufacturing; Mar2025, Vol. 36 Issue 3, p1923-1942, 20p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 183282715
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Virtual metrology for chemical mechanical planarization of semiconductor wafers.
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      – Type: doi
        Value: 10.1007/s10845-024-02335-0
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      – Code: eng
        Text: English
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        PageCount: 20
        StartPage: 1923
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      – TitleFull: Virtual metrology for chemical mechanical planarization of semiconductor wafers.
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            NameFull: Deivendran, Balamurugan
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            NameFull: Masampally, Vishnu Swaroopji
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            NameFull: Nadimpalli, Naga Ravikumar Varma
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              Text: Mar2025
              Type: published
              Y: 2025
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              Value: 36
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