APA (7th ed.) Citation

Liu, G., Ye, J., Tan, Z., Lian, S., Yan, X., & Wang, J. (2025). Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films. Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, 43(2), 1. https://doi.org/10.1116/6.0004323

Chicago Style (17th ed.) Citation

Liu, Gong-Wen, Jin-Peng Ye, Zhi-Rou Tan, Song-You Lian, Xin-Liang Yan, and Jiang-Yong Wang. "Methods for Automatically Obtaining the Sputtering-induced Roughness upon Depth Profiling of Polycrystalline Films." Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics 43, no. 2 (2025): 1. https://doi.org/10.1116/6.0004323.

MLA (9th ed.) Citation

Liu, Gong-Wen, et al. "Methods for Automatically Obtaining the Sputtering-induced Roughness upon Depth Profiling of Polycrystalline Films." Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, vol. 43, no. 2, 2025, p. 1, https://doi.org/10.1116/6.0004323.