Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films. - Liu, Gong-Wen; Ye, Jin-Peng; Tan, Zhi-Rou; Lian, Song-You; Yan, Xin-Liang; Wang, Jiang-Yong (Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, 2025)