Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films.
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| Title: | Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films. |
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| Authors: | Liu, Gong-Wen1, Ye, Jin-Peng2, Tan, Zhi-Rou1, Lian, Song-You1,3, sylian1@stu.edu.cn, Yan, Xin-Liang4, xlyan@gdmu.edu.cn, Wang, Jiang-Yong1,3 |
| Source: | Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Mar2025, Vol. 43 Issue 2, p1-9, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 21662746 |
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| DOI: | 10.1116/6.0004323 |
