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Diffusion Transport of Target Material for a Planar Asymmetrical Hollow Cathode Sputtering System.

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Title: Diffusion Transport of Target Material for a Planar Asymmetrical Hollow Cathode Sputtering System.
Authors: Butnyakov, D. A.1, butnyakovda@yandex.ru, Sorokin, I. A.1,2, iasorokin@mail.ru, Kolodko, D. V.1,2, dobrynya_kol@mail.ru
Source: Plasma Chemistry & Plasma Processing; May2025, Vol. 45 Issue 3, p1029-1044, 16p
Database: Applied Science & Technology Source
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        Value: 10.1007/s11090-025-10550-7
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        Text: English
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      – TitleFull: Diffusion Transport of Target Material for a Planar Asymmetrical Hollow Cathode Sputtering System.
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              Text: May2025
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