Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers: Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers: E. Herth et al. - Herth, Etienne; Cavalliers, Bruno; Salhi, Sarra; Kardous, Faten; Fall, Dame; Rousseau, Lionel; Valbin, Laurie; Lardet-Vieudrin, Franck (Journal of Electronic Materials, 2025)