Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings. - Kaziev, Andrey V.; Tumarkin, Alexander V.; Kolodko, Dobrynya V.; Kharkov, Maksim M.; Konaguru, Raghavendra; Ageychenkov, Dmitry G.; Samotaev, Nikolay N.; Oblov, Konstantin Yu. (Applied Sciences (2076-3417), 2025)