Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors.
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| Title: | Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors. |
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| Authors: | Brozek, Tomasz1, tomasz.brozek@pdf.com, Lam, Stephen1, Hess, Christopher1, Weiland, Larg1, Moe, Matthew1, Shen, Xumin1, Chen, John1, De, Indranil1, Strojwas, Marcin1, Strojwas, Andrzej1, Kibarian, John K.1 |
| Source: | IEEE Transactions on Semiconductor Manufacturing; May2025, Vol. 38 Issue 2, p126-133, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 08946507 |
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| DOI: | 10.1109/TSM.2024.3510232 |
