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Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors.

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Title: Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors.
Authors: Brozek, Tomasz1, tomasz.brozek@pdf.com, Lam, Stephen1, Hess, Christopher1, Weiland, Larg1, Moe, Matthew1, Shen, Xumin1, Chen, John1, De, Indranil1, Strojwas, Marcin1, Strojwas, Andrzej1, Kibarian, John K.1
Source: IEEE Transactions on Semiconductor Manufacturing; May2025, Vol. 38 Issue 2, p126-133, 8p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 184925636
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors.
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  Data: <searchLink fieldCode="AU" term="%22Brozek%2C+Tomasz%22">Brozek, Tomasz</searchLink><relatesTo>1</relatesTo>, <i>tomasz.brozek@pdf.com</i><br /><searchLink fieldCode="AU" term="%22Lam%2C+Stephen%22">Lam, Stephen</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Hess%2C+Christopher%22">Hess, Christopher</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Weiland%2C+Larg%22">Weiland, Larg</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Moe%2C+Matthew%22">Moe, Matthew</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Shen%2C+Xumin%22">Shen, Xumin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Chen%2C+John%22">Chen, John</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22De%2C+Indranil%22">De, Indranil</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Strojwas%2C+Marcin%22">Strojwas, Marcin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Strojwas%2C+Andrzej%22">Strojwas, Andrzej</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Kibarian%2C+John+K%2E%22">Kibarian, John K.</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22IEEE+Transactions+on+Semiconductor+Manufacturing%22">IEEE Transactions on Semiconductor Manufacturing</searchLink>; May2025, Vol. 38 Issue 2, p126-133, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=184925636
RecordInfo BibRecord:
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        Value: 10.1109/TSM.2024.3510232
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        Text: English
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              Text: May2025
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              Y: 2025
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