Analysis of x-ray emission spectroscopy (XES) data using artificial intelligence techniques included in the XES Neo package. - Humiston, Alaina; Lau, Miu Lun; Stack, Tim; Restuccia, Evan; Herrera-Gomez, Alberto; Long, Min; Olive, Daniel T.; Terry, Jeff (Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 2025)