Li, H., Wang, H., Li, Y., Lu, X., Li, L., Yan, Y., & Guo, W. (2025). Micro-nanoscale laser subsurface vertical modification of 4H-SiC semiconductor materials: Mechanisms, processes, and challenges. Discover Nano, 20(1), 1. https://doi.org/10.1186/s11671-025-04309-4
Chicago Style (17th ed.) CitationLi, Hongmei, Hongwei Wang, Yuxin Li, Xiwen Lu, Lin Li, Yinzhou Yan, and Wei Guo. "Micro-nanoscale Laser Subsurface Vertical Modification of 4H-SiC Semiconductor Materials: Mechanisms, Processes, and Challenges." Discover Nano 20, no. 1 (2025): 1. https://doi.org/10.1186/s11671-025-04309-4.
MLA (9th ed.) CitationLi, Hongmei, et al. "Micro-nanoscale Laser Subsurface Vertical Modification of 4H-SiC Semiconductor Materials: Mechanisms, Processes, and Challenges." Discover Nano, vol. 20, no. 1, 2025, p. 1, https://doi.org/10.1186/s11671-025-04309-4.