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Micro-nanoscale laser subsurface vertical modification of 4H-SiC semiconductor materials: mechanisms, processes, and challenges.

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Title: Micro-nanoscale laser subsurface vertical modification of 4H-SiC semiconductor materials: mechanisms, processes, and challenges.
Authors: Li, Hongmei1,2, Wang, Hongwei1, Li, Yuxin1, Lu, Xiwen1, Li, Lin1, Yan, Yinzhou2, Guo, Wei1, guowei123@nimte.ac.cn
Source: Discover Nano; 7/16/2025, Vol. 20 Issue 1, p1-27, 27p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 186678712
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PubType: Academic Journal
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  Data: Micro-nanoscale laser subsurface vertical modification of 4H-SiC semiconductor materials: mechanisms, processes, and challenges.
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  Data: <searchLink fieldCode="AU" term="%22Li%2C+Hongmei%22">Li, Hongmei</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Wang%2C+Hongwei%22">Wang, Hongwei</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+Yuxin%22">Li, Yuxin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Lu%2C+Xiwen%22">Lu, Xiwen</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+Lin%22">Li, Lin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Yan%2C+Yinzhou%22">Yan, Yinzhou</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Guo%2C+Wei%22">Guo, Wei</searchLink><relatesTo>1</relatesTo>, <i>guowei123@nimte.ac.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Discover+Nano%22">Discover Nano</searchLink>; 7/16/2025, Vol. 20 Issue 1, p1-27, 27p
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      – Type: doi
        Value: 10.1186/s11671-025-04309-4
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        Text: English
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              Text: 7/16/2025
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              Y: 2025
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