70‐1:Invited Paper: Challenges of Atomic‐Layer‐Deposited Oxide Semiconductor Channels beyond PVD: Material, Devices, and M3D Stacked Structures.

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Bibliographic Details
Title:	70‐1:Invited Paper: Challenges of Atomic‐Layer‐Deposited Oxide Semiconductor Channels beyond PVD: Material, Devices, and M3D Stacked Structures.
Authors:	Kim, Yoon-Seo¹, Choi, Su-Hwan², Oh, Hyejin¹, Hwang, Taewon¹, Park, Jin-Seong^1,2
Source:	SID Symposium Digest of Technical Papers; Jun2025, Vol. 56 Issue 1, p946-949, 4p
Database:	Applied Science & Technology Source

Description
ISSN:	0097966X
DOI:	10.1002/sdtp.18327