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Chemical–Mechanical Super-Polishing of Al 2 O 3 (0001) Wafer for Epitaxial Purposes.

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Bibliographic Details
Title: Chemical–Mechanical Super-Polishing of Al 2 O 3 (0001) Wafer for Epitaxial Purposes.
Authors: Lee, Chih-Hao1, chlee@mx.nthu.edu.tw, Lee, Chih-Hong1
Source: Crystals (2073-4352); Aug2025, Vol. 15 Issue 8, p694, 10p
Database: Applied Science & Technology Source
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        Value: 10.3390/cryst15080694
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        Text: English
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      – TitleFull: Chemical–Mechanical Super-Polishing of Al 2 O 3 (0001) Wafer for Epitaxial Purposes.
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              Text: Aug2025
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