Chemical–Mechanical Super-Polishing of Al 2 O 3 (0001) Wafer for Epitaxial Purposes.
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| Title: | Chemical–Mechanical Super-Polishing of Al 2 O 3 (0001) Wafer for Epitaxial Purposes. |
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| Authors: | Lee, Chih-Hao1, chlee@mx.nthu.edu.tw, Lee, Chih-Hong1 |
| Source: | Crystals (2073-4352); Aug2025, Vol. 15 Issue 8, p694, 10p |
| Database: | Applied Science & Technology Source |
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