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Thin dielectric to dielectric hydrophilic wafer bonding for FD-SOI and C-FET manufacturing.

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Bibliographic Details
Title: Thin dielectric to dielectric hydrophilic wafer bonding for FD-SOI and C-FET manufacturing.
Authors: Noel, P.1, paul.noel@cea.fr, Larrey, V.1, Tardif, S.2, Rieutord, F.3, Landru, D.3, Fournel, F.1
Source: Solid-State Electronics; Nov2025, Vol. 229, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 187841064
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Thin dielectric to dielectric hydrophilic wafer bonding for FD-SOI and C-FET manufacturing.
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  Data: <searchLink fieldCode="AU" term="%22Noel%2C+P%2E%22">Noel, P.</searchLink><relatesTo>1</relatesTo>, <i>paul.noel@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Larrey%2C+V%2E%22">Larrey, V.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Tardif%2C+S%2E%22">Tardif, S.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Rieutord%2C+F%2E%22">Rieutord, F.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Landru%2C+D%2E%22">Landru, D.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Fournel%2C+F%2E%22">Fournel, F.</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Solid-State+Electronics%22">Solid-State Electronics</searchLink>; Nov2025, Vol. 229, pN.PAG-N.PAG, 1p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=187841064
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.sse.2025.109188
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 1
        StartPage: N.PAG
    Titles:
      – TitleFull: Thin dielectric to dielectric hydrophilic wafer bonding for FD-SOI and C-FET manufacturing.
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          Name:
            NameFull: Noel, P.
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            NameFull: Larrey, V.
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            NameFull: Tardif, S.
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            NameFull: Rieutord, F.
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            NameFull: Landru, D.
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            NameFull: Fournel, F.
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          Dates:
            – D: 01
              M: 11
              Text: Nov2025
              Type: published
              Y: 2025
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              Value: 00381101
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              Value: 229
          Titles:
            – TitleFull: Solid-State Electronics
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