Effect of oxygen content on p-type electrical conductivity in β-Ga2O3 films.

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Bibliographic Details
Title: Effect of oxygen content on p-type electrical conductivity in β-Ga2O3 films.
Authors: Park, Se-Rim1,2, Chi, Zeyu1,2, zeyu.chi@uvsq.fr, Sartel, Corinne2, Koo, Sang-Mo1, Fregnaux, Mathieu3, Zheng, Yunlin4, Douglas, Sean5, Penman, Lewis5, Massabuau, Fabien5, Tchelidze, Tamar6, Chauveau, Jean-Michel1,2, jean-michel.chauveau@uvsq.fr, Chikoidze, Ekaterine1,2, ekaterine.chikoidze@uvsq.fr
Source: Materials Science in Semiconductor Processing; Dec2025, Vol. 200, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
Description
ISSN:13698001
DOI:10.1016/j.mssp.2025.110003