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A Study of HiPIMS Process Characteristics in SiO 2 Deposition.

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Title: A Study of HiPIMS Process Characteristics in SiO 2 Deposition.
Authors: Gajdics, Marcell1,2, gajdics.marcell@ek.hun-ren.hu, Olasz, Dániel1,2, Sáfrán, György1, Serényi, Miklós1
Source: Coatings (2079-6412); Sep2025, Vol. 15 Issue 9, p1023, 13p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 188280960
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.3390/coatings15091023
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      – Code: eng
        Text: English
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        PageCount: 13
        StartPage: 1023
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      – TitleFull: A Study of HiPIMS Process Characteristics in SiO 2 Deposition.
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            NameFull: Sáfrán, György
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              Text: Sep2025
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              Y: 2025
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              Value: 15
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              Value: 9
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