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SiMiC: Context-aware silicon microstructure characterization using attention-based convolutional neural networks for field-emission tip analysis.

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Bibliographic Details
Title: SiMiC: Context-aware silicon microstructure characterization using attention-based convolutional neural networks for field-emission tip analysis.
Authors: Tan, Jing Jie1,2, tanjingjie@1utar.my, Schreiner, Rupert2, Hausladen, Matthias2, Asgharzade, Ali2, Edler, Simon3, Bartsch, Julian3, Bachmann, Michael3, Schels, Andreas3, Kwan, Ban-Hoe1, Ng, Danny Wee-Kiat1, Hum, Yan-Chai1
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2026, Vol. 43 Issue 6, p1-9, 9p
Database: Applied Science & Technology Source
Description
ISSN:21662746
DOI:10.1116/6.0005068