Yuan, X., Bai, X., Huang, K., Wei, J., Chen, L., Liu, J., . . . Wang, W. (2025). Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy. Coatings (2079-6412), 15(12), 1481. https://doi.org/10.3390/coatings15121481
Chicago Style (17th ed.) CitationYuan, Xiaolu, Xueyang Bai, Ke Huang, Junjun Wei, Liangxian Chen, Jinlong Liu, Chengming Li, and Wenrui Wang. "Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy." Coatings (2079-6412) 15, no. 12 (2025): 1481. https://doi.org/10.3390/coatings15121481.
MLA (9th ed.) CitationYuan, Xiaolu, et al. "Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy." Coatings (2079-6412), vol. 15, no. 12, 2025, p. 1481, https://doi.org/10.3390/coatings15121481.