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Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy.

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Title: Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy.
Authors: Yuan, Xiaolu1,2, Bai, Xueyang2,3, Huang, Ke2,3, Wei, Junjun1,2, Chen, Liangxian2, Liu, Jinlong2,3, Li, Chengming2, Wang, Wenrui1
Source: Coatings (2079-6412); Dec2025, Vol. 15 Issue 12, p1481, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 190529289
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=190529289
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.3390/coatings15121481
    Languages:
      – Code: eng
        Text: English
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        PageCount: 9
        StartPage: 1481
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      – TitleFull: Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy.
        Type: main
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            NameFull: Yuan, Xiaolu
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            NameFull: Bai, Xueyang
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            NameFull: Wei, Junjun
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            NameFull: Chen, Liangxian
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            NameFull: Liu, Jinlong
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            NameFull: Li, Chengming
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            – D: 01
              M: 12
              Text: Dec2025
              Type: published
              Y: 2025
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              Value: 15
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              Value: 12
          Titles:
            – TitleFull: Coatings (2079-6412)
              Type: main
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