Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy. - Yuan, Xiaolu; Bai, Xueyang; Huang, Ke; Wei, Junjun; Chen, Liangxian; Liu, Jinlong; Li, Chengming; Wang, Wenrui (Coatings (2079-6412), 2025)