View in EDS HTML Full Text PDF Full Text

In Situ GISAXS Study of IZO Deposition via Magnetron Sputtering for Optoelectronic Devices: Film Growth and Ion Bombardment‐Induced Degradation Dynamics.

Saved in:
Bibliographic Details
Title: In Situ GISAXS Study of IZO Deposition via Magnetron Sputtering for Optoelectronic Devices: Film Growth and Ion Bombardment‐Induced Degradation Dynamics.
Authors: Zhong, Huaying1, Härtel, Marlene Sophie2, Chen, Wei3, Spanier, Lukas V.1, Yin, Shanshan4, Zhang, Jiahuan2, Seibertz, Bertwin Bilgrim Otto5, Szyszka, Bernd5, Albrecht, Steve2,5, Schwartzkopf, Matthias6, Roth, Stephan V.6,7, Müller‐Buschbaum, Peter1, muellerb@ph.tum.de
Source: Advanced Science; 1/27/2026, Vol. 13 Issue 5, p1-14, 14p
Database: Applied Science & Technology Source
Full text is not displayed to guests.
FullText Links:
  – Type: pdflink
Text:
  Availability: 1
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 191139369
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: In Situ GISAXS Study of IZO Deposition via Magnetron Sputtering for Optoelectronic Devices: Film Growth and Ion Bombardment‐Induced Degradation Dynamics.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Zhong%2C+Huaying%22">Zhong, Huaying</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Härtel%2C+Marlene+Sophie%22">Härtel, Marlene Sophie</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Chen%2C+Wei%22">Chen, Wei</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Spanier%2C+Lukas+V%2E%22">Spanier, Lukas V.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Yin%2C+Shanshan%22">Yin, Shanshan</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Jiahuan%22">Zhang, Jiahuan</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Seibertz%2C+Bertwin+Bilgrim+Otto%22">Seibertz, Bertwin Bilgrim Otto</searchLink><relatesTo>5</relatesTo><br /><searchLink fieldCode="AU" term="%22Szyszka%2C+Bernd%22">Szyszka, Bernd</searchLink><relatesTo>5</relatesTo><br /><searchLink fieldCode="AU" term="%22Albrecht%2C+Steve%22">Albrecht, Steve</searchLink><relatesTo>2,5</relatesTo><br /><searchLink fieldCode="AU" term="%22Schwartzkopf%2C+Matthias%22">Schwartzkopf, Matthias</searchLink><relatesTo>6</relatesTo><br /><searchLink fieldCode="AU" term="%22Roth%2C+Stephan+V%2E%22">Roth, Stephan V.</searchLink><relatesTo>6,7</relatesTo><br /><searchLink fieldCode="AU" term="%22Müller‐Buschbaum%2C+Peter%22">Müller‐Buschbaum, Peter</searchLink><relatesTo>1</relatesTo>, <i>muellerb@ph.tum.de</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Advanced+Science%22">Advanced Science</searchLink>; 1/27/2026, Vol. 13 Issue 5, p1-14, 14p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=191139369
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1002/advs.202516853
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 14
        StartPage: 1
    Titles:
      – TitleFull: In Situ GISAXS Study of IZO Deposition via Magnetron Sputtering for Optoelectronic Devices: Film Growth and Ion Bombardment‐Induced Degradation Dynamics.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Zhong, Huaying
      – PersonEntity:
          Name:
            NameFull: Härtel, Marlene Sophie
      – PersonEntity:
          Name:
            NameFull: Chen, Wei
      – PersonEntity:
          Name:
            NameFull: Spanier, Lukas V.
      – PersonEntity:
          Name:
            NameFull: Yin, Shanshan
      – PersonEntity:
          Name:
            NameFull: Zhang, Jiahuan
      – PersonEntity:
          Name:
            NameFull: Seibertz, Bertwin Bilgrim Otto
      – PersonEntity:
          Name:
            NameFull: Szyszka, Bernd
      – PersonEntity:
          Name:
            NameFull: Albrecht, Steve
      – PersonEntity:
          Name:
            NameFull: Schwartzkopf, Matthias
      – PersonEntity:
          Name:
            NameFull: Roth, Stephan V.
      – PersonEntity:
          Name:
            NameFull: Müller‐Buschbaum, Peter
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 27
              M: 01
              Text: 1/27/2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 21983844
          Numbering:
            – Type: volume
              Value: 13
            – Type: issue
              Value: 5
          Titles:
            – TitleFull: Advanced Science
              Type: main
ResultId 1