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Simulation and Fabrication of Gradient Films via Shadow-Mask-Assisted Magnetron Sputtering for Uniform Heating in Nonrectangular Areas.

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Title: Simulation and Fabrication of Gradient Films via Shadow-Mask-Assisted Magnetron Sputtering for Uniform Heating in Nonrectangular Areas.
Authors: Shi, Runqi1, Gao, Runzhe2, Ou, Yingchun1, ouyingchun@cbma.com.cn, Tian, Haodong1,2, Xu, Shuang1, Jia, Jinsheng1, Han, Bin1
Source: Applied Sciences (2076-3417); Feb2026, Vol. 16 Issue 3, p1556, 19p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 191608923
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.3390/app16031556
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      – Code: eng
        Text: English
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        PageCount: 19
        StartPage: 1556
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      – TitleFull: Simulation and Fabrication of Gradient Films via Shadow-Mask-Assisted Magnetron Sputtering for Uniform Heating in Nonrectangular Areas.
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            NameFull: Shi, Runqi
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            NameFull: Tian, Haodong
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            NameFull: Xu, Shuang
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            NameFull: Jia, Jinsheng
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            NameFull: Han, Bin
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            – D: 01
              M: 02
              Text: Feb2026
              Type: published
              Y: 2026
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