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Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi 2 Membranes for Extreme Ultraviolet Pellicles.

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Title: Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi 2 Membranes for Extreme Ultraviolet Pellicles.
Authors: Kim, Won Jin1,2, Wi, Seong Ju1,2, Moon, Seungchan2,3, Hong, Junho1,2, Lee, Taeho2, Park, Young Wook2,3, Ahn, Jinho1,2,3, jhahn@hanyang.ac.kr
Source: Crystals (2073-4352); Feb2026, Vol. 16 Issue 2, p150, 10p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 192034893
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi 2 Membranes for Extreme Ultraviolet Pellicles.
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      – Type: doi
        Value: 10.3390/cryst16020150
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      – Code: eng
        Text: English
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      – TitleFull: Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi 2 Membranes for Extreme Ultraviolet Pellicles.
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            NameFull: Kim, Won Jin
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            NameFull: Wi, Seong Ju
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              Text: Feb2026
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              Y: 2026
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